Proceedings of the 1st Euspen Topical Conference on Fabrication and Metrology in Nanotechnology, Cop

Center for Geometrical Metrology, Technical University of Denmark

Book Title: Proceedings of the 1st Euspen Topical Conference on Fabrication and Metrology in Nanotechnology, Cop
Card Number: 107390
Publish Year: 2000
Dewey Code: 620.5 PRO
ISBN
Pages: 2 v.
Publisher: Center for Geometrical Metrology, Technical University of Denmark
Authors: Danish Institute for Fundamental Metrology.

Technical University of Denmark.; Center for Geometrical Metrology.
Subjects: Congresses

Micromachining

Congresses

Nanotechnology